Physics of Microfabrication: Front End Processing

This course is offered to graduates and focuses on understanding the fundamental principles of the “front-end” processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion, ion implantation, and epitaxy. Other topics covered include: high performance MOS and bipolar devices including ultra-thin gate oxides, implant-damage enhanced diffusion, advanced metrology, and new …

The syllabus, on MIT OpenCourseWare

The full course — syllabus, assigned readings, problem sets, exams, and lecture notes — lives on OCW. These open the real thing: