Submicrometer and Nanometer Technology
6.781J · Electrical Engineering and Computer Science, Mechanical Engineering · Graduate · Spring 2006
Prof. George Barbastathis, Prof. Henry Smith, Prof. Karl Berggren
<p>This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, micro…
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Prof. George Barbastathis, Prof. Henry Smith, Prof. Karl Berggren. 6.781J Submicrometer and Nanometer Technology. Spring 2006. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: CC BY-NC-SA 4.0.
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