Semiconductor Manufacturing
6.780 · Electrical Engineering and Computer Science · Graduate · Spring 2003
Prof. Duane Boning
6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
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Prof. Duane Boning. 6.780 Semiconductor Manufacturing. Spring 2003. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: CC BY-NC-SA 4.0.
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