Design and Fabrication of Microelectromechanical Devices
6.777J · Electrical Engineering and Computer Science, Mechanical Engineering · Graduate · Spring 2007
Prof. Carol Livermore, Prof. Joel Voldman
6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic…
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Prof. Carol Livermore, Prof. Joel Voldman. 6.777J Design and Fabrication of Microelectromechanical Devices. Spring 2007. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: CC BY-NC-SA 4.0.
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