Micro/Nano Processing Technology
6.152J · Electrical Engineering and Computer Science, Materials Science and Engineering · Undergraduate · Fall 2005
Prof. Martin Schmidt, Susan Ruff, Dr. Robert O’Handley
This course introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, u…
The syllabus, on MIT OpenCourseWare
The full course — syllabus, assigned readings, problem sets, exams, and lecture notes — lives on OCW. These open the real thing:
Syllabus ↗
Course overview, grading, schedule
Readings ↗
The assigned reading list, session by session
Assignments ↗
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Attribution
Prof. Martin Schmidt, Susan Ruff, Dr. Robert O’Handley. 6.152J Micro/Nano Processing Technology. Fall 2005. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: CC BY-NC-SA 4.0.
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