Electron Microprobe Analysis
12.141 · Earth, Atmospheric, and Planetary Sciences · Undergraduate · January IAP 2012
Dr. Nilanjan Chatterjee
The electron microprobe provides a complete micrometer-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic X-rays excited by an electron beam incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis through wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and scanning electron imaging with back-scattered electron (BSE), secondary …
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Dr. Nilanjan Chatterjee. 12.141 Electron Microprobe Analysis. January IAP 2012. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: CC BY-NC-SA 4.0.
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